Calibration of an in-line digital holographic microscope

Verfasst von

Hannes Robben, Reinhard Caspary, Konrad Bethmann, Bernhard Roth

Abstract

We present a calibration method that correlates in-line measurement results from a digital holographic microscope (DHM) integrated into a two-photon polymerisation system (TPP) with offline results from a high-resolution laser scanning microscope (LSM). Our findings indicate that a single calibration step for a specific polymer is sufficient to reliably monitor the fabrication of various structures. In future, this approach will make it possible to adapt the production process to the manufactured structure geometry in real time.

Details

Organisationseinheit(en)
PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Institut für Informationsverarbeitung
Typ
Aufsatz in Konferenzband
Publikationsdatum
22.09.2025
Publikationsstatus
Veröffentlicht
Peer-reviewed
Ja
ASJC Scopus Sachgebiete
Allgemeine Physik und Astronomie
Elektronische Version(en)
https://doi.org/10.1051/epjconf/202533501003 (Zugang: Offen )

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